Tube furnace

  • doping process for Si solar cells
  • up to 4 inch wafer
  • max 1150 C, H2, O2, N2 gas

Mask aligner

  • micro-patterning process
  • metallization step for Si solar cells
  • up to 4 inch wafer

Wet bench 

  • wet etch/ wet cleaning process
  • Auto quick dump rinser (QDR) 
  • with DI generator

Glove box

  • moisture & Oxygen control system
(1 ppm > O2, H2O)
  • for 1.5 Person (3 Glove ports)

Evaporator

  • thermal evaporator @ Glove box
  • up to 100 mm x 100 mm Subst.
  • 2 source materials available 

thermal ALD 

& PE-ALD

  • Max temp.: up to 400 'C
  • 600W HCP generator 
  • 4 inch wafer
  • passivation layer: Al2O3, TiO2, Si3N4 

Solar simulator

  • solar cell efficiency measurement
  • class AAA light source
  • up to 156 mm x 156 mm

IPCE

  • solar cell Quantum efficiency measurement
  • wavelength from 400 to 1100 nm

QSSPC

  • WCT-120 - Sinton Instruments
  • minority carrier lifetime measurement
  • calibrated PL lifetime curve alongside a calibrated QSSPC lifetime curve

Suns-Voc

  • SUNS-VOC - Sinton Instrument
  • IV curve of the diode without the effects of series resistance
  • wavelength from 400 to 1100 nm

Vapor-phase etch

  • HF vapor-phase etch process
  • with Temperature controller (< 50 C)
  • for meta-assisted chemical etch

Ellipsometer

  • 6 wavelengths (Film Sense)
  • 405 – 950 nm spectral range
  • Sample sizes up to 200 mm dia. and 20 mm in thickness 

Spin-coater

  • up to 6000 rpm
  • up to 8 inch wafer

Battery test system

  • Won-A tech, 32 chennels

Optical microscope

  • x2000 magnification
  • with CMOS camera

Probe station

  • current-voltage characterization of microdevices
  • 4 units of microprobes
  • with optical microscope

Wafer dicing machine

  • Dicing Area : X-axis: 8", Y-axis: 8"  
  • Dicing Depth: depended on cutting blade diameter:
  • Rotation: 180° by the motor (rotate speed/degree programmable)

Centrifuge

  • MAX: 50 ml, 6 tubes
  • up to 4000 rpm

Sonicator

  • Temp: max 70 'C
  • heating power: 150 W
  • frequency: 40 KHz 

Vacuum oven

  • Temp: max 250 'C
  • with rotary pump

Convection oven

  • Max 250 'C

Oxygen plasma system

  • Process Mode: PE
  • Chameber: W.140 x D.200 x H.110 (mm)
  • Generator: 20~100kHz
  • Max.: 100W