Tube furnace

• doping process for Si solar cells
• up to 4 inch wafer
• max 1150 C, H2, O2, N2 gas

Mask aligner

• micro-patterning process
• metallization step for Si solar cells
• up to 4 inch wafer

Wet bench 

• wet etch/ wet cleaning process
• Auto quick dump rinser (QDR) 
• with DI generator

Glove box

• moisture & Oxygen control system

• for 1.5 Person (3 Glove ports)

Evaporator

• thermal evaporator @ Glove box
• up to 100 mm x 100 mm Subst.
• 2 source materials available 

thermal ALD 

& PE-ALD

• Max temp.: up to 400 'C
• 600W HCP generator 
• 4 inch wafer
• passivation layer: Al2O3, TiO2, Si3N4 

Solar simulator

• solar cell efficiency measurement
• class AAA light source
• up to 156 mm x 156 mm

IPCE

• solar cell Quantum efficiency measurement
• wavelength from 400 to 1100 nm

QSSPC

• WCT-120 - Sinton Instruments
• minority carrier lifetime measurement
• calibrated PL lifetime curve alongside a calibrated QSSPC lifetime curve

Suns-Voc

• SUNS-VOC - Sinton Instrument
• IV curve of the diode without the effects of series resistance
• wavelength from 400 to 1100 nm

Vapor-phase etch

• HF vapor-phase etch process
• with Temperature controller (< 50 C)
• for meta-assisted chemical etch

Ellipsometer

• 6 wavelengths (Film Sense)
• 405 – 950 nm spectral range
• Sample sizes up to 200 mm dia. and 20 mm in thickness 

Spin-coater

• up to 6000 rpm
• up to 8 inch wafer

Battery test system

• Won-A tech, 32 chennels

Optical microscope

• x2000 magnification
• with CMOS camera

Probe station

• current-voltage characterization of microdevices
• 4 units of microprobes
• with optical microscope

Wafer dicing machine

• Dicing Area : X-axis: 8", Y-axis: 8"  
• Dicing Depth: depended on cutting blade diameter:
• Rotation: 180° by the motor (rotate speed/degree programmable)

Centrifuge

• MAX: 50 ml, 6 tubes
• up to 4000 rpm

Sonicator

• Temp: max 70 'C
• heating power: 150 W
• frequency: 40 KHz 

Vacuum oven

• Temp: max 250 'C
• with rotary pump

Convection oven

• Max 250 'C

Oxygen plasma system

• Process Mode: PE
• Chameber: W.140 x D.200 x H.110 (mm)
• Generator: 20~100kHz
• Max.: 100W